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Room-temperature Ohmic contact on n-type GaN with surface treatment using Cl2 inductively coupled plasma

โœ Scribed by Jang, Ho Won; Jeon, Chang Min; Kim, Jong Kyu; Lee, Jong-Lam


Book ID
115484005
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
274 KB
Volume
78
Category
Article
ISSN
0003-6951

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