Room-Temperature Ohmic Contact on AlGaN/GaN Heterostructure with Surface Treatment Using N[sub 2] Inductively Coupled Plasma

✍ Scribed by Jeon, Chang Min; Jang, Ho Won; Choi, Kyoung Jin; Bae, Sung-Bum; Lee, Jung-Hee; Lee, Jong-Lam

• Book ID: 115486483
• Publisher: The Electrochemical Society
• Year: 2002
• Tongue: English
• Weight: 78 KB
• Volume: 5
• Category: Article
• ISSN: 1099-0062
• DOI: 10.1149/1.1479296