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Effect of calcination on the crystallinity of sputtered TiO2 thin films as studied by Raman scattering

✍ Scribed by B. Karunagaran; D. Mangalaraj; Kyunghae Kim; Byungyou Hong; Yonghan Roh; Cheon Seok Park; Junsin Yi

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 170 KB
Volume: 40
Category: Article
ISSN: 0232-1300
DOI: 10.1002/crat.200410329

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## Abstract Plasma CVD is a candidate technology for the fabrication of optical polymer waveguides. It can deposit a film on any surface geometry and any substrate material at a temperature under 200 °C in a vacuum process. It also provides good thickness controllability and uniformity of the depos