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Effect of boron ion implantation and subsequent anneals on the properties of Si nanocrystals

✍ Scribed by G. A. Kachurin; S. G. Cherkova; V. A. Volodin; D. M. Marin; D. I. Tetel’baum; H. Becker

Book ID: 111443441
Publisher: Springer
Year: 2006
Tongue: English
Weight: 214 KB
Volume: 40
Category: Article
ISSN: 1063-7826
DOI: 10.1134/s1063782606010131

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