Investigations of thermal annealing effe
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C. Baristiran Kaynak; M. Lukosius; I. Costina; B. Tillack; Ch. Wenger; G. Ruhl;
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Article
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2010
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Elsevier Science
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English
⚖ 395 KB
The annealing effects on dielectric and electrode materials in Ti/SrTaO/TaN/TiN/Ti/Si metal-insulatormetal (MIM) capacitors were studied. The electrical and structural properties were investigated after subjecting the samples to annealing temperatures of 500 °C, 700 °C and 900 °C. The electrical res