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Effect of annealing on the electrical properties of insulating aluminum nitride in MIM and MIS structures

✍ Scribed by Ortiz, Carlos R.; Pantojas, Victor M.; Otaño-Rivera, Wilfredo


Book ID
122187761
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
919 KB
Volume
91
Category
Article
ISSN
0038-1101

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The annealing effects on dielectric and electrode materials in Ti/SrTaO/TaN/TiN/Ti/Si metal-insulatormetal (MIM) capacitors were studied. The electrical and structural properties were investigated after subjecting the samples to annealing temperatures of 500 °C, 700 °C and 900 °C. The electrical res