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Effect of annealing of LaB films investigated by Auger electron spectroscopy

✍ Scribed by J.G. Ociepa

Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
633 KB
Volume
120
Category
Article
ISSN
0040-6090

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Annealing effect of SnO2 films prepared
Annealing effect of SnO2 films prepared by chemical vapor deposition: Evidence of chlorine removal by auger electron spectroscopy and rutherford back-scattering spectrometry studies
✍ K. Kim; T.G. Finstad; W.K. Chu; X.B. Cox; R.W. Linton 📂 Article 📅 1985 🏛 Elsevier Science ⚖ 267 KB

Using a rather simple chemical vapor deposition apparatus, transparent conducting tin oxide films were fabricated through the decomposition of SnCl4.5H20. The films showed good electrical properties but high chlorine contamination. We have found that the chlorine can be removed by annealing at 500 K