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Effect of additional HCl injection on growth and doping in the In-PH3-HCl-H2 system

✍ Scribed by H. Jürgensen; D. Grundmann; M. Heyen; P. Balk

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 347 KB
Volume: 70
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(84)90256-2

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