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Effect of a substrate on the composition, structure, and hardness of nitride and boride films produced by ion deposition methods

✍ Scribed by P. I. Ignatenko; D. N. Terpiy; N. A. Klyakhina


Book ID
111448554
Publisher
Springer
Year
2009
Tongue
English
Weight
267 KB
Volume
54
Category
Article
ISSN
1063-7842

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