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Dynamic Pull-in of Shunt Capacitive MEMS Switches

✍ Scribed by Krishna Vummidi; M. Khater; E. Abdel-Rahman; A. Nayfeh; S. Raman


Book ID
108254886
Publisher
Elsevier
Year
2009
Weight
1019 KB
Volume
1
Category
Article
ISSN
1876-6196

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## Abstract A unified, macroscopic, one‐dimensional model is presented for the quantitative description of the process of dielectric charging in RF MEMS capacitive switches. The model provides for the direct incorporation of various physical factors known to impact dielectric charging, such as surf