Dynamic Operational Stress Measurement of MEMS Using Time-Resolved Raman Spectroscopy

✍ Scribed by Pomeroy, J.W.; Gkotsis, P.; Zhu, M.; Leighton, G.; Kirby, P.; Kuball, M.

• Book ID: 120648761
• Publisher: IEEE
• Year: 2008
• Tongue: English
• Weight: 590 KB
• Volume: 17
• Category: Article
• ISSN: 1057-7157
• DOI: 10.1109/JMEMS.2008.2004849