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Stress Monitoring of Post-processed MEMS Silicon Microbridge Structures Using Raman Spectroscopy

✍ Scribed by Starman, L.; Coutu, R.

Book ID: 120387329
Publisher: Sage Publications
Year: 2012
Tongue: English
Weight: 788 KB
Volume: 52
Category: Article
ISSN: 0014-4851
DOI: 10.1007/s11340-011-9586-9

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