Dynamic Behaviour of Nanoscale Electrostatic Actuators
โ Scribed by Wen-Hui, Lin; Ya-Pu, Zhao
- Book ID
- 120268954
- Publisher
- Institute of Physics
- Year
- 2003
- Tongue
- English
- Weight
- 211 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0256-307X
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