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Dynamic Pull-In of Parallel-Plate and Torsional Electrostatic MEMS Actuators

โœ Scribed by Nielson, G.N.; Barbastathis, G.

Book ID
119945383
Publisher
IEEE
Year
2006
Tongue
English
Weight
493 KB
Volume
15
Category
Article
ISSN
1057-7157

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Dynamics of polysilicon parallel-plate e
Dynamics of polysilicon parallel-plate electrostatic actuators
โœ Patrick B. Chu; Phyllis R. Nelson; Mark L. Tachiki; Kristofer S.J. Pister ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 585 KB

The response of a polysilicon parallel-plate electrostatic actuator to a.c. signals at different bias voltages has been measured with a laser interferometer. Using microhinges, large plates (with areas from 100 "am 2 to = 0.1 mm 2) with long thin support beams (such as 600 ~m X 3 ,am ร— 1.5 ,am) are