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Size-dependent pull-in instability of electrostatically actuated microbeam-based MEMS

โœ Scribed by Wang, Binglei; Zhou, Shenjie; Zhao, Junfeng; Chen, Xi


Book ID
120090295
Publisher
Institute of Physics
Year
2011
Tongue
English
Weight
410 KB
Volume
21
Category
Article
ISSN
0960-1317

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