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Dual functional distribution of failure in GaAs multichip microwave monolithic integrated circuits (MMICs)

โœ Scribed by Christou, A.; Tang, P.F.; Hu, J.M.


Book ID
114534823
Publisher
IEEE
Year
1992
Tongue
English
Weight
573 KB
Volume
39
Category
Article
ISSN
0018-9383

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Semi-insulating liquid-incapsulated Czochralski GaAs wafers are generally used as substrates for the fabrication of monolithic microwave integrated circuits. In the fabrication process, the wafer is subjected to temperature cycling during the various stages of processing, namely post-ion implantatio