Process-induced defects in manufacture o
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R.K. Purohit; G.C. Dubey; S. Dayal; R. Gulati; V.R. Balakrishnan; Koteshwar Rao;
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Article
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1994
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Elsevier Science
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English
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Semi-insulating liquid-incapsulated Czochralski GaAs wafers are generally used as substrates for the fabrication of monolithic microwave integrated circuits. In the fabrication process, the wafer is subjected to temperature cycling during the various stages of processing, namely post-ion implantatio