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Dry etching utilizing showered electron beam assisted etching

✍ Scribed by S. Matsui; H. Watanabe

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 375 KB
Volume: 17
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(92)90069-4

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