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Dry-etching processes for high-temperature superconductors

✍ Scribed by L. Alff; G.M. Fischer; R. Gross; F. Kober; A. Beck; K.D. Husemann; T. Nissel; F. Schmidl; C. Burckhardt

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 908 KB
Volume: 200
Category: Article
ISSN: 0921-4534
DOI: 10.1016/0921-4534(92)90378-p

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