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Dry etching characteristics of GaN for blue/green light-emitting diode fabrication

✍ Scribed by K.H. Baik; S.J. Pearton

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 560 KB
Volume: 255
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.01.041

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