𝔖 Bobbio Scriptorium
✦   LIBER   ✦

DRIE based technology for 3D silicon barcodes fabrication

✍ Scribed by R. Gómez-Martínez; A. Sánchez; M. Duch; J. Esteve; J.A. Plaza

Book ID
108265233
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
808 KB
Volume
154
Category
Article
ISSN
0925-4005

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Macroporous silicon: A versatile materia
Macroporous silicon: A versatile material for 3D structure fabrication
✍ T. Trifonov; A. Rodríguez; L.F. Marsal; J. Pallarès; R. Alcubilla 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 995 KB

This work focuses on the fabrication of three-dimensional (3D) microstructures by electrochemical etching of n-type silicon. We exploit the possibility of modulating the pore diameter along the growing direction to produce quasi-3D structures which exhibit periodicity also in third dimension. The fa