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DRIE based technology for 3D silicon barcodes fabrication

✍ Scribed by R. Gómez-Martínez; A. Sánchez; M. Duch; J. Esteve; J.A. Plaza

Book ID
108254898
Publisher
Elsevier
Year
2009
Weight
546 KB
Volume
1
Category
Article
ISSN
1876-6196

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