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Double-crystal X-ray diffraction analysis of low-temperature ion implanted silicon

✍ Scribed by F. Cembali; M. Servidori; A. Zani

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 858 KB
Volume: 28
Category: Article
ISSN: 0038-1101
DOI: 10.1016/0038-1101(85)90087-5

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