Double-crystal x-ray diffraction analysis of low-temperature ion implanted silicon : F. Cembali, M. Servidori and A. Zani. Solid-St. Electron28 (9) 933 (1985)

• Publisher: Elsevier Science
• Year: 1986
• Tongue: English
• Weight: 132 KB
• Volume: 26
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(86)90197-6