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Dose dependence of crystallinity and resistivity in ion beam synthesised CoSi2 layers

โœ Scribed by R.S. Spraggs; K.J. Reeson; R.M. Gwilliam; B.J. Sealy; A. De Veirman; J. van Landuyt


Book ID
113282491
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
956 KB
Volume
55
Category
Article
ISSN
0168-583X

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