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Doping of silicon with selenium by diffusion from the gas phase

✍ Scribed by Astrov, Yu. A.; Shuman, V. B.; Portsel, L. M.; Lodygin, A. N.

Book ID: 125394859
Publisher: Springer
Year: 2014
Tongue: English
Weight: 156 KB
Volume: 48
Category: Article
ISSN: 1063-7826
DOI: 10.1134/S1063782614030038

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