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Doping characteristics and electrical properties of Mg-doped AlGaN grown by atmospheric-pressure MOCVD

✍ Scribed by Suzuki, Mariko; Nishio, Johji; Onomura, Masaaki; Hongo, Chie

Book ID
108342737
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
147 KB
Volume
189-190
Category
Article
ISSN
0022-0248

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## Abstract Chlorine‐doped ZnO thin films were grown by MOCVD on sapphire and fused silica. Chlorine is incorporated in substitution for oxygen and acts as a donor, leading to an increase of electron concentration. Transport properties were studied for samples with different chlorine content. Hall