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Dopant, defects and oxygen interaction in MeV implanted Czochralski silicon

✍ Scribed by A. La Ferla; G. Galvagno; V. Raineri; F. Priolo; A. Carnera; A. Gasparotto; E. Rimini

Book ID
113284918
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
508 KB
Volume
96
Category
Article
ISSN
0168-583X

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