DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs

✍ Scribed by Deborah Munro

• Publisher: Springer International Publishing
• Year: 2019
• Tongue: English
• Leaves: 192
• Edition: 1st ed. 2019
• Category: Library

✦ Synopsis

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.

✦ Table of Contents

Front Matter ....Pages i-xvi
Introduction (Deborah Munro)....Pages 1-9
NNCI (Deborah Munro)....Pages 11-19
Working in a Cleanroom (Deborah Munro)....Pages 21-30
MEMS Fabrication Process (Deborah Munro)....Pages 31-47
Equipment (Deborah Munro)....Pages 49-55
Tools and Supplies (Deborah Munro)....Pages 57-65
Designing for MEMS (Deborah Munro)....Pages 67-74
Soft Materials and Bioprinting (Deborah Munro)....Pages 75-76
Imaging and Metrology (Deborah Munro)....Pages 77-79
Testing (Deborah Munro)....Pages 81-94
Transporting (Deborah Munro)....Pages 95-96
Regulatory Approval Pathways (Deborah Munro)....Pages 97-108
Locations of US Facilities (Deborah Munro)....Pages 109-134
Meet the Lab Directors (Deborah Munro)....Pages 135-140
Collaborating with a Facility (Deborah Munro)....Pages 141-149
Beyond NNCI: International Facilities (Deborah Munro)....Pages 151-170
Intellectual Property (Deborah Munro)....Pages 171-173
Getting Project Assistance (Deborah Munro)....Pages 175-177
Costs (Deborah Munro)....Pages 179-182
Taking the First Steps (Deborah Munro)....Pages 183-183
Back Matter ....Pages 185-188

✦ Subjects

Physics; Electronic Circuits and Devices; Electronics and Microelectronics, Instrumentation; Biomedical Engineering/Biotechnology; Nanotechnology and Microengineering; Industrial and Production Engineering