Rapid dislocation-related D1-photolumine
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Schmid, R. P. ;Mankovics, D. ;Arguirov, T. ;Ratzke, M. ;Mchedlidze, T. ;Kittler,
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Article
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2011
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John Wiley and Sons
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English
β 334 KB
## Abstract Here we report on a novel method, which allows rapid photoluminescence imaging of bandβtoβband and dislocationβrelated radiation, D1, on multicrystalline silicon wafers at room temperature. We demonstrate spatially resolved 5.0βΓβ5.0βcm^2^ D1βimages, with a resolution of βΌ120βΒ΅m, within