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Discharge phenomena of an atmospheric pressure radio-frequency capacitive plasma source

✍ Scribed by Park, Jaeyoung; Henins, I.; Herrmann, H. W.; Selwyn, G. S.; Hicks, R. F.

Book ID
120430176
Publisher
American Institute of Physics
Year
2001
Tongue
English
Weight
945 KB
Volume
89
Category
Article
ISSN
0021-8979

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In this paper, the electrical discharge characteristics of plasmas generated in coaxial cylindrical electrodes capacitively powered by a radio-frequency power supply at atmospheric pressure are investigated with respect to helium and argon gases. The electrical discharge parameters, voltage (V), cur