Gas breakdown in an atmospheric pressure radio-frequency capacitive plasma source

✍ Scribed by Park, Jaeyoung; Henins, I.; Herrmann, H. W.; Selwyn, G. S.

• Book ID: 121485531
• Publisher: American Institute of Physics
• Year: 2001
• Tongue: English
• Weight: 321 KB
• Volume: 89
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1323754