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Direct plasma beam deposition of TiNx layers with an r.f. plasma beam source

✍ Scribed by F.R. Weber; H. Oechsner

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 486 KB
Volume: 59
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(93)90089-7

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