✦ LIBER ✦

Direct low-energy electron beam nanolithography

✍ Scribed by Daniel Aronov; Gil Rosenman

Book ID: 108280782
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 444 KB
Volume: 603
Category: Article
ISSN: 0039-6028
DOI: 10.1016/j.susc.2009.05.027

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