𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Direct laser fabrication of blaze gratings in fused silica

✍ Scribed by Pfeifer, M.; Weissmantel, S.; Reisse, G.

Book ID
120440259
Publisher
Springer
Year
2012
Tongue
English
Weight
535 KB
Volume
112
Category
Article
ISSN
1432-0630

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Cost-effective fabrication of a phase ma
Cost-effective fabrication of a phase mask by direct etching of the laser-interference grating on fused silica substrate
✍ Ying-Tsung Lu; Yung-Hsin Chen; Sien Chi πŸ“‚ Article πŸ“… 2003 πŸ› John Wiley and Sons 🌐 English βš– 176 KB

## Abstract A simple and cost‐effective method to manufacture a phase mask with high diffraction efficiency for deep UV application is proposed. The deep rectangular grating fabricated by using laser interference is etched directly into a fused silica substrate, instead of the dielectric coating on