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Fabrication of submicron gratings in fused silica by F2-laser ablation

✍ Scribed by J. Ihlemann; S. Müller; S. Puschmann; D. Schäfer; M. Wei; J. Li; P.R. Herman

Publisher: Springer
Year: 2003
Tongue: English
Weight: 135 KB
Volume: 76
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-002-1467-8

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