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Direct formation of grating structures on silicon using KrF laser radiation

✍ Scribed by Fedosejevs, Robert ;Brett, M. J.

Book ID
115340118
Publisher
The Optical Society
Year
1989
Tongue
English
Weight
832 KB
Volume
28
Category
Article
ISSN
1559-128X

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The surface dehydrochlorination of poly(vinyldenchloride) film was performed to produce a conjugated polyyne and polyene structures by photo-irradiation with a KrF excimer laser at 248 nm in a vacuum chamber. The reaction was confirmed by detection of HCl with a mass spectrometer and by measurement