✦ LIBER ✦
VIA-2 rapid direct writing of surface relief structures in silicon using laser photoetching
✍ Scribed by Ehrlich, D.J.; Osgood, R.M., Jr.; Deutsch, T.F.
- Book ID
- 114593937
- Publisher
- IEEE
- Year
- 1981
- Tongue
- English
- Weight
- 193 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0018-9383
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