𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Direct FIB fabrication and integration of “single nanopore devices” for the manipulation of macromolecules

✍ Scribed by B. Schiedt; L. Auvray; L. Bacri; G. Oukhaled; A. Madouri; E. Bourhis; G. Patriarche; J. Pelta; R. Jede; J. Gierak

Book ID
104052646
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
539 KB
Volume
87
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Fabrication of high-aspect-ratio submicr
Fabrication of high-aspect-ratio submicron-to-nanometer range microstructures in LiNbO3 for the next generation of integrated optoelectronic devices by focused ion beams (FIB)
✍ Shizhuo Yin 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 150 KB 👁 2 views

The fabrication of high-aspect-ratio submicron-to-nanometer range microstructures in LiNbO using a state-of-the-art Schlum-3 ( ) berger AMS 3000 focused ion-beam FIB system is presented. The submicron structures with about 350 nm width and 1600 nm depth are fabricated by employing XeF gas-assisted g