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Direct detection of H atoms in the catalytic chemical vapor deposition of the SiH[sub 4]/H[sub 2] system

✍ Scribed by H. Umemoto; K. Ohara; D. Morita; Y. Nozaki; A. Masuda; H. Matsumura

Book ID: 124061198
Publisher: American Institute of Physics
Year: 2002
Tongue: English
Weight: 240 KB
Volume: 91
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1428800

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