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Oxynitride Deposition Kinetics in a SiH[sub 4]-CO[sub 2]-NH[sub 3]-H[sub 2] System

✍ Scribed by Gaind, A. K.

Book ID: 115518755
Publisher: The Electrochemical Society
Year: 1977
Tongue: English
Weight: 914 KB
Volume: 124
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.2133357

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