Direct detection in Transmission Electron Microscopy with a pitch CMOS pixel sensor

✍ Scribed by Devis Contarato; Peter Denes; Dionisio Doering; John Joseph; Brad Krieger

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 355 KB
• Volume: 635
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2011.01.087

✦ Synopsis

This paper presents the characterization of a CMOS monolithic pixel sensor prototype optimized for direct detection in Transmission Electron Microscopy (TEM). The sensor was manufactured in a deepsubmicron commercial CMOS process and features pixels of 5 mm pitch. Different pixel architectures have been implemented in the test chip, and the best performing architecture has been selected from a series of tests performed with 300 keV electrons. Irradiation tests to high electron doses have also been performed in order to estimate device lifetime.