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Direct bonding with on-wafer metal interconnections

✍ Scribed by C. Jia; M. Wiemer; T. Gessner

Book ID: 106184823
Publisher: Springer-Verlag
Year: 2005
Tongue: English
Weight: 486 KB
Volume: 12
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-005-0034-6

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