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Direct bonding of silicon carbide wafers with a regular relief at the interface

✍ Scribed by I. V. Grekhov; L. S. Kostina; T. S. Argunova; E. I. Belyakova; J. H. Je; P. A. Ivanov; T. P. Samsonova


Book ID
111449426
Publisher
SP MAIK Nauka/Interperiodica
Year
2006
Tongue
English
Weight
187 KB
Volume
32
Category
Article
ISSN
1063-7850

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