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Diffusion phenomenon and loss of adhesion in chemically amplified negative resists

✍ Scribed by Gilles Amblard; Alain Inard; André Weill; Frédéric Lalanne; Jean Pierre Panabiere

Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
392 KB
Volume
17
Category
Article
ISSN
0167-9317

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