✦ LIBER ✦
Determination of acid diffusion and energy deposition parameters by point e-beam exposure in chemically amplified resists
✍ Scribed by I. Raptis; L. Grella; P. Argits; M. Gentili; N. Glezos; G. Petrocco
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 552 KB
- Volume
- 30
- Category
- Article
- ISSN
- 0167-9317
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