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Diffusion of Phosphorus in silicon dioxide from a spin-on source

✍ Scribed by M. Kuisl; E. Sasse

Book ID: 107862778
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 430 KB
Volume: 65
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(80)90247-3

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