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Diffusion of antimony in silicon in the presence of point defects

โœ Scribed by Xiangkun Yu; K.B. Ma; Q.Y. Chen; Xuemei Wang; Jiarui Liu; Wei-Kan Chu; Lin Shao; Phillip E. Thompson


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
192 KB
Volume
261
Category
Article
ISSN
0168-583X

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