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Diffusion of antimony in epitaxial silicon obtained by sublimation in a vacuum

✍ Scribed by V. A. Uskov; S. P. Svetlov

Book ID: 112427550
Publisher: Springer
Year: 1972
Tongue: English
Weight: 193 KB
Volume: 15
Category: Article
ISSN: 1573-9228
DOI: 10.1007/bf00894706

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