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Diffusion model for high-temperature off-state currents in SOI MOSFETs

โœ Scribed by T.E. Rudenko; V.I. Kilchitskaya; A.N. Rudenko


Book ID
104306454
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
281 KB
Volume
36
Category
Article
ISSN
0167-9317

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โœฆ Synopsis


In this paper off-state drain currents in long-channel inversion mode SOI MOSFETs are investigated in the range 50-320ยฐC by measurements and simulations. The behavior of high-temperature (T>200ยฐC) off-state currents is interpreted in terms of diffusion model, based on the analysis of carrier distribution in a SO1 film in off-state of the device. The back-gate biasing and the silicon film thinning effects on high-temperature off-state currents are analyzed.


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