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Diffusing species and growth interfaces during cobalt disilicide formation

✍ Scribed by C.M. Comrie


Book ID
113287234
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
421 KB
Volume
118
Category
Article
ISSN
0168-583X

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✍ C.C Theron; J.A Mars; F.J Mundalamo; J Farmer; R Pretorius πŸ“‚ Article πŸ“… 2000 πŸ› Elsevier Science 🌐 English βš– 155 KB

Certain silicide phases are not very suitable as interconnects or contacts, since they normally grow non-uniformly with rough interfaces. In certain cases this limitation can be surmounted when the normal growth mechanism is altered by the use of a particular diffusion barrier layer. It is the purpo