Formation of smooth interfaces during si
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C.C Theron; J.A Mars; F.J Mundalamo; J Farmer; R Pretorius
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Article
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2000
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Elsevier Science
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English
β 155 KB
Certain silicide phases are not very suitable as interconnects or contacts, since they normally grow non-uniformly with rough interfaces. In certain cases this limitation can be surmounted when the normal growth mechanism is altered by the use of a particular diffusion barrier layer. It is the purpo