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Diffuse X-ray scattering from misfit and threading dislocations in relaxed epitaxial layers

✍ Scribed by S. Daniš; V. Holý


Book ID
116599010
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
123 KB
Volume
401
Category
Article
ISSN
0925-8388

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## Abstract We propose a common description of the full widths at half maximum of X‐ray diffraction peaks obtained in different scans of triple‐crystal diffractometry and as well as for glancing incidence and glancing exit double‐crystal measurements. Calculations are compared with measurements of